6DD1641-0AB0

6DD1641-0AB0

0 引言
　　随着PC（Personal Computer）的发展和普及，采用PC+运动控制卡作为上位控制将是运动控制系统的一个主要发展趋势。这种方案可充分利用计算机资源，用于运动过程、运动轨迹都比较复杂，且精度、柔性比较强的机器和设备。由于光刻机对于精度的要求特别高，因此本系统采用了PC+PMAC开放式多轴运动控制器的控制方式。即将PMAC运动控制卡插进PC机的标准插槽中作实时控制，而PC机作为人机界面和系统治理的上位机。
1 系统硬件结构
1.1 PMAC结构与原理
　　PMAC是一种开放式可编程多轴运动控制器 ，它采用 Motorola DSP 56001 数字信号处理2器作为 CPU ，其结构如图1所示。PMAC 适应多种硬件操纵平台 ，具有 PC、STD、VME、PCI、104 总线及串口脱机运行的功能 ，方便用户选用适合自己的主机。PMAC 适用于所有电动机 ，包括普通的交（直）流电动机、交（直）流伺服电动机、步进电动机、直线电动机等 ，对不同电动机 ，PMAC可提供相应的控制信号。
PMAC能够支持多达256个运动程序。任意坐标系在任何时候都可以执行这些程序中的任意一个，即使另外的坐标系正在执行同样的程序。PMAC能够同时执行和该卡上坐标系数目一样多的运动程序。一个运动程序能够将任何一个其它的运动程序调用作为子程序，可以带变元，也可以不带变量。

图1 PMAC结构图

1.2光刻机控制系统硬件结构及工作原理
　　PMAC运动控制卡上的CPU与PC机的CPU构成主从式双CPU控制模式：上位机PC机的CPU可以专注于人机界面、实时监控和发送指令等系统治理工作；下位机PMAC卡上的CPU用来实时处理所有运动控制的细节：升降速计算、行程控制、多轴插补等，无需占用PC机资源。
　　同时PMAC运动控制卡还提供了功能强大的运动控制软件库：C语言运动库、Windows DLL动态链接库等，能更快、更有效地解决复杂的运动控制题目。
　　PMAC卡与PC机之间有ISA总线和双端口RAM两种通讯方式。其中主机与PMAC卡主要通过总线通讯，即主机到的地址往PMAC卡。
　　PMAC卡与电机则主要通过DPRAM进行通讯。DPRAM用来与PMAC进行快速的数据和命令通讯。在向PMAC卡写数据时通常用于在实时状态下快速的位置数据和旋转程序信息的重复下载。在从PMAC卡读数据时通常用于重复快速地获得状态信息。比如电机状态，位置，速度，跟随误差等的数据可不停地更新并被PLC程序或被PMAC自动地写进DPRAM。
　　由于通过DPRAM进行的数据存取不需要经过通讯口发送命令和等待响应，所以响应速度非常快。

图2光刻机控制系统硬件图

2系统的软件部分
　　PMAC卡本身自带一个PEWIN32执行软件，该软件能对系统进行控制和测试，创建和治理PMAC应用系统，提供用户终端界面，设置系统参数，编写系统运动程序。因此，用户可以先编写程序，再下载到PMAC卡中运行。
　　本文采用了PMAC运动程序以及PLC程序相结合的方法。为了使光刻的图案美观，清楚，我们用激光器刻以圆点的形式进行打点。偶数行与奇数行错开半个圆，使每个圆都互相外切。这样刻出的图形才会更加紧凑，不会出现漏点情况。
运动程序部分：
&1
#1->Z #2->Y #4->X
M1->Y: $FFC2, 14, 1
M2->Y: $FFC2, 14, 1
M401->X: $C00D, 0, 24 S
M402->X: $C005, 0, 24, S
OPEN PROGRAM 1 CLEAR
INC
TA200
TS99
F50000
……
PLC程序部分：
&n
bsp; OPEN PLC 1 CLEAR
M1=0
Q6=M401
IF（Q1=0）
Q3=Q6-Q5
IF（Q3>900＊Q9+450）
M2=1
Q9=Q9+1
ELSE
M2=0
ENDIF
Q10=8889
ENDIF
……
3 结束语
　　本文通过PMAC卡在光刻机控制系统的实际应用，介绍了一种运动程序与PLC程序相结合的方法，控制光刻机的运动。该方法已经被某公司的所实际应用，起到了很好的经济效益。

S

Seagate ST380020A 80 GB 5400 RPM IDE Hard Drive

Samsung 2GB PC2-5300 240-Pin DDR2-667 1.5V Low-Voltage FBDIMM Fully Buffered RAM

Western Digital WD Caviar WD800AB 80 GB IDE 5400 RPM Hard Drive

Motorola 2N5943 412 PNP Type Transistor Pack of 3 / TO-39

In Pentium 4 520 SL7J5 2.8 GHz LGA 775 CPU

Palit Nvidia 7200GS DDR2 256MB PCI-E DVI VGA Video Card

In Pentium 4 511 2.8 GHz SL8U5 LGA 775 CPU

In Pentium 4 524 SL9CA 3.06 GHz LGA 775 CPU

Johnson Controls TE-6413W-2110 Temperature Sensor

Cisco Systems CAB-SS-530MT 72-1434-01 10 Ft DTE Male to Smart Serial Cable

Seagate ST380021A 80 GB 7200 RPM IDE Hard Drive

In Pentium D SL94P 3.4 GHz LGA 775 CPU

PolyPro-Klean / PPK09NG0030 Air Filter

Delta Electronics AFB0412HHB DC Brushless Fan DC12V

Cisco Systems Aironet 340 Series AIR-PCI342 Wireless

Cisco Systems PA-4T+ Fast Serial Enhanced 800-01838-07

National 763507-01 Type X2 1.1 Meter Length Cable

Fujitsu MAY2073RC 73 GB 10K 2.5 SAS Hard Drive

In Xeon 3040 SL9VT 1.86 GHz Dual Core Socket 775 CPU

Trimble 45336-00 Ultra-Compact Embedded HFL GPS Antenna for Lassen IQ

New/Opened Box Dell H6188 PCI-X Riser Board

Network Appliance 114-00021 AC / Astec RS-PSU-AC1N P/S

Adaptec ASR-2010s / 48MB SCSI Raid Controller Card

Asoka PL-9720-USB PlugLink USB Wall Mount - Single Pack

Dell 7W584 Maxtor Atlas 10K IV 8B146J008075G 146 GB Ultra320 SCSI Hard Drive

Stratos Lightwave MGBC-20-4-1-S GBIC Fiber

Finisar FCMJ-8521-3 1 Gbps SFP Transceiver

HP Hewlett-Packard Agilent 10631B GPIB 2m Cable

HP JetDirect Card For LaserJet II III C2071E Token Ring

Myricom LANAI 9.0 PCIDMA1.1

SuperMicro RSC-R1UU-UE8 PCI-E x8 Riser Card (Left Side)

HP JetDirect 10B-T Printer Network Interface Card J2552

Maxtor Fireball 3 2F040L0 40GB 5400 RPM IDE Hard Drive Apple

Rabbit "Minolta" EP-8010 Black Toner

Dell GY581 Seagate ST373455SS 73 GB 15K RPM SAS Hard Drive

In Pentium 4 630 3.0 GHz SL7Z9 LGA 775 CPU

Compaq iPAQ Connection Point CP-2W Kit Router 241274-001

Vertical / evantage ML-298CD Office Phone

Seagate ST373307FC 73 GB 10K Fibre Channel Hard Drive

HP Hewlett-Packard Agilent E2078-62101 HPIB GPIB Extender

IBM Personal System/2 Dual Async Adapter/A 6451013

Western Digital WD Caviar WD600BB 60 GB IDE 7200 RPM Hard Drive

AMD Opteron Model 850 OSA850CEP5AV 2.4 GHz Socket 940 CPU

New Genuine HP C4196A Transfer Kit for Color LaserJet

IBM DCRA-22160 2160 MB 2.5" IDE Hard Drive

Finisar FTR-8519-3B Multi-Mode 850nm GBIC

Hewlett Packard HP BD1468A4C5 146GB 10K U320 SCSI Drive with Drive Tray

Dell 90VUE 2U Rail Complete Kit PowerEdge 2450/2550
Compaq BN37A-1E SCSI 1.5 Meter Cable 401941-001

Maxtor 6Y080P0 80 GB 7200 RPM IDE PATA Hard Drive

Lot of 5 HP/Agilent Probe Ground Leads 5959-9334

New APC 1U+1U Blanking Panel Kit AR8108BLK

Western Digital WD Caviar WD2000JB 200 GB IDE 7200 RPM HDD

Mylex Ultra-2 PCI SCSI Raid Controller DAC960PRL

Dell NAS Server 1U / 1P Versa Rail Rack Complete Kit G1197

Fujitsu MHT2060AH 60 GB 4200 RPM IDE 2.5" Hard Drive

Hitachi IC25N060ATMR04-?0 60 GB 4200 RPM IDE 2.5" Hard Drive

Nanya NT2GT72U8PD1BN-?3C 2GB 2RX8 PC2-5300F FB-DIMM Fully Buffered Server RAM

Nanya NT2GT72U8PD1BD-?3C 2GB 2RX8 PC2-5300F FB-DIMM Fully Buffered Server RAM

Kingston KTH-XW667/2G 2GB (2x1GB) 2RX8 PC2-5300F FB-DIMM Server RAM

Kingston KTH-XW9400K2/4G 4GB (2x2GB) 128X4 PC2-5300 ECC Registered Server RAM

WLG500-3B MINI PCI / ISA Wireless Card

Maxtor DiamondMax 10 6L080L0 80 GB 7200 RPM IDE Hard Drive

HP 5181-2085 DDP2 Direct Distribution Panel

Maxtor STM3802110A 80 GB 7200 RPM IDE Hard Drive

Bourns 3541H-427-103L Potentiometer Hybritron RES 10Kohm 10% Lin 0.10% 1234M NEW

AMD Opteron 2216 OSA2216GAA6CQ 2.4 GHz Socket F Dual Core CPU

Dell 2K221 Western Digital WD WD800BB 80 GB 7200 RPM IDE Hard Drive

Seagate ST3146707FC 146GB 10K RPM Fibre Channel Hard Drive

In Pentium D 915 2.8 GHz SL9DA LGA 775 CPU

Maxtor MaXLine II 5A320J0 320GB IDE ATA133 Hard Drive NetApp 108-00088 X266A

3Com Modem Dongle (3C-PC-MDM-US-C?BL)

Fujitsu MHJ2181AT 18 GB 4200 RPM 2.5" IDE Hard Drive

Seagate ST3120023A 120 GB 7200 RPM IDE Hard Drive

Hewlett Packard HP 360209-011 BF1468A4CC 146 GB 15K Ultra 320 SCSI Drive

Minebea Astrosyn Stepper Motor Type 17PM-K103V (T0925) NEW

NEW! LOT of (4) Budwig Rectangular Thermoplastic Rubber Feet 1"x2"

Seagate ST340016A 40 GB 7200 RPM IDE Hard Drive

Dell 9P516 ST340016A 40 GB 7200 RPM IDE Hard Drive

In PRO/1000 GT C80241-002 Desktop Adapter

Tributaries SA201 Single Channel S-Video Compensator

NEW IN BOX Xerox 108R149 Document Feed Head Assembly

Hewlett-Packard HP 1 GHz Terminiation Adapter 16515-63202

IBM 02K6643 ThinkPad Li-Ion Multiple Battery Charger

Sun Half & 1/4-height 3.5" HDD Spud Bracket 540-3923

Cisco Systems 72-22632-01 Serial Cable

Philips HP Agilent SpO2/PLETH M1020A Plug-In Module for M1041A Rack Viridia

Philips HP Agilent ECG/RESP M1002B Plug-In Module for M1041A Rack Viridia

WinFast L2300V 8MB 3DLabs Permidia 2V PCI video card

NANOTEC 0.95A Phasemotor Stepper Motor ST4209S1006-KFU?T

Cisco 2M (M)/DB15(M) DTE 72-0682 High Density Applique & Interface Cable V.35

Lot of 2 - New Tektronix Phaser 3-Color Transfer Rolls 016-0906-01

ViaTV VC105 Set-Top Conferencing Video Phone

New IBM 40K9636 DB9 to RJ45 6 Ft Cable

Edimax ED-1416P 16-Port Dual Speed HUB

3M D Ribbon Socket Metal Faced, 3549-2002

Genuine Konica Minolta 1710517-003 Magenta Toner

Pulsar Microwave 8-Way Splitter P8-H8-454/1B

ABB S201-K15 Miniature Circuit Breaker

Hewlett Packard HP NetRAID 1Si SCI Controller

Genuine Sharp F0-35TD Maintenance Cartridge

Altera PLE3-12 Master Programming Unit with PLED600

RF Cable 00-990626-26 Cable

Cisco Catalyst 4000/4500 8-port FXS WS-U4604-8FXS AGM

Sharp 4L-U4EB 4" Monochrome LCD Display Panel 383x234 Pixels CCFL 1:50 Contrast

Dell 1074T 12GB 4200 RPM 9.5MM 2.5" ATA-66 Notebook Hard Drive Fujitsu:MHK2120?AT

Dell 9964T 12GB 4200 RPM 9.5MM 2.5" ATA/IDE HardDrive IBM Travelstar DARA-212000

Lot of 3 emecanique ZB2BA5 Yellow Push Button

IBM 26K5153 146 GB 10K RPM 80-Pin SCSI U320 Hard Drive

HP Hewlett-Packard Agilent 10833A 1 Meter GPIB Cable

In Pentium D 925 3.0 GHz SL9KA LGA 775 CPU

In T6500 Core 2 Duo SLGF4 2.1 GHz Socket P CPU

Numatics Mark 3 Power Valve Systems 229-524

HP Hewlett-Packard E1714-60203 Cable

HP Hewlett-Packard E1723-60201

Klockner Moeller UHI-PKZ 2 Undervoltage Trip w/ Auxiliary Contact

New Sunon MB40201VX-0000-?G99 12V DC 1.38W Brushless Fan

Computer Products AC Adapter Power Supply SCL25-7630E

AMD Opteron 848 OSA848CEP5AV Socket 940 CPU

Elpida IBM 2GB 39M5811 EBE21RD4AEFA-4A?-E PC2-3200 ECC Registered 240P Server RAM

SMC EZ Connect 11Mbps Wireless USB Adapter SMC2662W

Cisco Systems 50CM Stackwise Cable 72-2632-01

PHIHONG PSA15W-050 AC Switching Power Adaptor

In Pentium 4 SL7QB 3.2 GHz Socket 478 CPU

In Pentium 4 SL7L7 3.2 GHz Socket 478 CPU

In P8600 Core 2 Duo SLB3S 2.4 GHz Socket P CPU

In T8100 Core 2 Duo SLAYP 2.1 GHz SLAYP Socket P Laptop CPU

In Core 2 Duo T5500 1.66 GHz SL9U4 Socket M CPU

HAC-2027 2X20 LCD Module

Finisar FCM-8520-2-2.5 2.5Gb/s Copper GBIC Transceiver

LZR Electronics AD058OR 5VDC 700mA Power Supply Adapter NEW IN BOX

CUI Inc. KSAFE0600400T1M?2 Power Adapter Output: 6.0V 4.0A NEW IN BOX

AVC 12-volt 2 Ball-Bearing "Squirrel Cage" Biscuit Fan BA10033B12S 4-Wire 2.85A

Sunon PMB1297PYB1-AY (2) DC12V 8.6W ZP Server Fan 2Wire

Sunon PMB1297PYB1-AY (2) DC12V 8.6W ZP Server Fan 3Wire

Hewlett Packard/Amp GBIC 887127-2 Intra-Enclosure Style

Cisco WIC-1B-S/T Interface Card

Cisco Systems 72-3383-01 DB9 to RJ45 Cable

Ortronics Modular OR-808004920 Quadframe 19" 48-port co Patch

Samsung/IBM 512MB PC3200 ECC/Registered 39M5799

Linksys WAPPOE12 Power Over Ethernet Adapter Injector

M17/113-RG316 Harbour Ind. Type N Female Bulkhead to SMA Approx:18" Jumper Cable

Maxtor 4R120L0 120 GB 5400 RPM IDE Hard Drive

EMC 038-003-289 2M HSSDC to HSSDC2 Cable
In Core 2 Duo T7300 2.0 GHz SLAMD Socket P CPU

BC16P-10 Cable Assembly 74988 0588

New Opened Samsung BP59-00138A TV Remote Control

Lucent / Avaya TN2224B 2W Digital Line V3 Line Card

AMD Opteron OSA8220GAA6CY 2.8 GHz Dual Core CPU

Sanyo Denki San Ace 40 9CRA0412P4J03 Fan w/ Connector

PSD1204PPBX-A (2). B2696.F.GN RDE0080043101 DC 12V Fan

NetApp 106-00045 FTRJ8519P1BNL 2 GB 850nm SFP Transceiver

Siemens 5SG7-132 Fuse Block

RSA SecurID 70014B7051606

New! Exabyte Exatape 8mm Cleaning Cartridge Tape Factory Sealed 309258-003

In Pentium 4 SL5YR 2.0 GHz Socket 478 CPU

Semtronics ESD Wrist Strap Monitor w/ RJ11

Swagelok 316 TWA Fitting

Digi/IBM 55000699-01 8 Port PCI/8R Serial Adapter Card

Allen Bradley SLC 500 Input Module 1746-IV16 Ser B

3COM 3C17225 SuperStack Switch Cable

Portescap C35MT02A12 Rotary Solenoid (Stepper/Can ?) 0426 Motor Two Wire

Portescap C35MT02A12 (Stepper/Can ?) 0427 Motor Two Wire

In Core 2 Duo T7500 2.2 GHz CPU SLAF8

In Core 2 Duo T7100 1.8 GHz CPU SLA4A

MAXRAD 2.4GHz-Range MP Series +8 dBi Panel Antenna

Johnson Emerson 415-0033-012 Coaxial Cable Assembly SMA Male to SMA Male

Super Module Products Performance 5 Plus 568B Wired

In Pentium 4 3.6 GHz SL7Z5 LGA 775 CPU

SPKRPHONE 110-3050-0000 Model 101-3050-000 Rev. B PCB

Glenair M85049/38S17N 0342 Clamp Strain Relief Connector (NEW IN BAG)

AC Adaptor SPA-4180 9V DC 500mA UL Power Supply Adapter 12W (New In Box)

GlobTek ITE +12V 1.25A Power Supply WR92E1250LCP-Y 15W MAX (New In Box)

AMIGO AM-9500 9VDC 500mA 15W Adapter AM9500 9V Power Supply (New In Box)

Quatech Dual Channel ISA RS-232/485 Adapter RW-100T

AC Adaptor SCP41-120500 12V 500mA UL Power Supply Adapter 10W (New In Box)

Dell 2P459 PS/2 POD SIP KVM Cable

SMC CJ2D10-30S Round Body Cylinder

Danaher Portescap S20M024S03-M5 Motorized Linear Actuator NEW 1.5" Shaft

3-Meter 62.5/125 SC to MTRJ Multimode Fiber Optic Cable

AMD Opteron OSA844CEP5AV 1.8 GHz Socket 940 CPU

AMD Opteron 244 OSA244CEP5AL 1.8 GHz Socket 940 CPU

Avago AFBR-57R5AQZ GBIC

FoxConn 3 ft. Ultra160 LVD 6-Device SCSI Cable

Agilent HFBR-57M5AP 850nm SFP Transceiver

Picolight PLRXLL-VC-SG3-2?4-N SFP Transceiver

TERAYON 10VDC 1200mA 20W Power Supply P/N:9200007 TEAD-48-101200U

In Xeon SL7AE 3.2 GHz Socket 604 CPU

CoolJAG 1U Solid Copper Socket 604/603 Heastsink & Fan 2RC/180

Nor Meridian M3902 Platinum Phone

Cisco Systems WIC-1B-U-V2 WAN Interface Card

In T2400 Core Duo 1.8 GHz Socket M CPU

e NM-ATM-1A-T3