Gemini™ MxG5xx 大气压至超高真空真空计-英福康（广州）真空仪器有限公司手机版

详细介绍

好处

Long lifetime in harsh environments
在恶劣环境下，使用寿命长
低杂散磁场
零维护 - 可换插头
超紧凑尺寸
抗腐蚀馈入装置
可选测量电流
2 relay setpoints (in conjunction with MxG55x EtherCAT Version)
EtherCAT and RS232/ RS485 digital interace

典型应用

基本压力监视和控制，在蒸发和溅射镀膜应用中从大气压到高真空。
一般真空测量 - 工业炉、建筑玻璃、半导体、冰箱和空调。
分析和研发应用 – 质谱分析、电子显微镜、医疗、眼科、光学和高能物理。

新闻

新一代冷阴极/冷阴极-皮拉尼组合真空计现在开放订购！

规格

类型		MAG5xx	MPG5xx
测量系统		Cold cathode ionization measurement system (according to the inverted magnetron principle)	Pirani and cold cathode ionization measurement system (according to the inverted magnetron principle)
测量范围（空气、氮气）		1×10^-9 … 1×10^-2	1×10^-9 … 1000
准确度 (N2)
1×10-8 … 1×10-2 毫巴	% of reading	30	30
1×10-2 … 100 毫巴	% of reading	-	30
100 … 1000 毫巴	% of reading	-	50
可重复性 (N2)
1×10-8 … 1×10-2 毫巴	% of reading	5	-
1×10-8 … 100 毫巴	% of reading	-	5
安装定位		any	any
容许压力	bar (absolute)	10 (limited to inert gases <>	10 (limited to inert gases <>
容许温度
运行（环境）	°C	+5 ... +55	+5 ... +55
法兰烘烤 (1)	°C	<150	<150
储存	°C	-40 ... +70	-40 ... +70
灯丝温度	°C	-	120
一年 30 天的相对湿度
1×10-7 … 1×10-2 毫巴	%	<95 (non-condensing)	<95 (non-condensing)
1×10-8 … 1×10-2 毫巴	%	<70 (non-condensing)	<70 (non-condensing)
供电电压
在量规 (2)	V (dc)	+14.5 ... +30	+14.5 ... +30
波纹	V (p-p)	<1	<1
功耗	W	<2	<2
待连接的保险丝	AT	<1	<1
电压范围
模拟输出	V	0 ... +10.5	0 ... +10.5
测量范围
3MAx-xxx-xxxN	V	<+0.5
3MBx-xxx-xxxP	V	-
3MAx-xxx-xxxQ	V	+0.667 ... +10
电压比压力
3MAx-xxx-xxxN	volts per decade	1 (logarithmic)
3MBx-xxx-xxxP	volts per decade	-
3MAx-xxx-xxxQ	volts per decade	1.33 (logaritmic)
错误信号
3MAx-xxx-xxxN	V	<+0.5
3MA-xxx-xxxQ	V	<+0.3
3MBx-xxx-xxxP	V	-
Output impedance	Ω	2 x 4.7 (short circuit-proof)
Load impedance	kΩ	>10 (short circuit-proof)
阶跃响应时间
p > 10-6 毫巴	ms	<100	<100
p = 10-8 毫巴	s	~1
量规标识 (FCC connector gauges)
3MAx-0xx-000N	kΩ	-
3MAx-0xx-000Q	kΩ	100
3MBx-0xx-000P	kΩ	-
状态（针 6）
Current rating	mA	100 (sink)
High Voltage is ON	V (dc)	+14.5 ... +30 (depending on supply voltage)
High Voltage is OFF	V (dc)	0
Status signal, digital output (D-sub connector)
Supply voltage	V (dc)	<30
Current rating	mA	100
High voltage ON	V (dc)	0
High voltage OFF		open
电气连接
3Mxx-0xx-000x		FCC68, 8-pin, female
3Mxx-0xx-010x		D-sub, 9-pin, male
3Mxx-0xx-04xx		D-Sub HD, 15-pin, male (for RS232/485 version)
3Mxx-xxx-x2Gx		D-Sub HD, 15-pin, male (for EtherCAT Version)
传感器电缆
3Mxx-0xx-000x		8-pin, shielded
3Mxx-0xx-010x		9-pin, shielded
3Mxx-0xx-04xx		D-Sub HD, 15-pin, male (for RS232/485 version)
3Mxx-xxx-x2Gx		D-Sub HD, 15-pin, male (for EtherCAT Version)
电缆长度
FCC connector cable	m	<50 (0.14 mm²/ conductor)
High voltage (in the measuring chamber)
Ignition voltage	kV	<4.5
工作电压	kV	<3.3	<3.3
Current (in the measuring chamber)
High current	µA	<380
Low current	µA	<130
Setpoint relays (MxG55x)
Range (N2)	mbar bar	5x10_-5 ... 1500
Relay contact		normally open (NO), potential free
Hysteresis	% of threshold	10
Contact rating of mechanical relays	V/A	<30/ <1
Switching time	ms	<30
曝露在真空的材料
3Mx0-xxx-xxxx		Ni alloy, Mo, AI₂O₃, glass, stainless steels
3Mx3-xxx-xxxx		Mo, AI₂O₃, stainless steels
3Mx0-11x-xxxx		Ni alloy, Mo, Al₂O₃, glass, Ti, stainless steels
3Mx3-11x-xxxx		Mo, Al₂O₃, Ti, stainless steels
内部容量
DN 25 ISO-KF	cm³
DN 40 ISO-KF	cm³	~20.9
DN 40 CF-F	cm³	~25.2
DN 40 CF-R	cm³	~25.6
内部容量	cm³	22.8	22.8
重量 (MxG50x)
DN 25 ISO-KF	g	<280	<280
DN 40 ISO-KF	g		<320
DN 40 CF-F & CF-R	g	<570	<570
Weight (MxG55x)
DN 25 ISO-KF	g	<280	<280
DN 40 ISO-KF	g		<320
DN 40 CF-F & CF-R	g	<570	<570
防护等级		IP 40	IP 40
CE conformity
RoHS		2011/65/EU
EMC		2014/30/EU, EN 61000-6-2, EN 61000-6-3, EN 61326-1
Safety		EN 61010-1
RS232C / 485C (MxG50x)
Baud rates	kBaud	9.6/ 19.2/ 38.4/ 57.6
Address		2 switches (address 00 - 255)
Digital functions		Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error.
Connector for RS232 & RS485		D-Sub HD, 15-pin, male
EtherCAT® (MxG55x)
Protocol		EtherCAT^_®
Communication standard		ETG.5003.1 S (R) V1.1.0 ⁴⁾ ETG.5003.2080 S (R) V1.3.0 ⁵⁾
Node address		Explicit Device Identification
Physical layer		100Base-Tx (IEEE 802.3)
Digital functions		Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error.
EtherCAT connector		2 x RJ45, 8-pin (socket), Input & output
EtherCAT cable		Special Ethernet Patch cable or crossover cable, shielded (CAT5e Quality or higher)
Cable lenght	m (ft.)	<100 (330)

1）没有电子元件。

2）电源单元的最小电压必须与传感器电缆的长度成比例地增加。

3）冷阴极点燃。

Gemini Ordering Information_13.03.2019.PNG

附件

MAG5xx
零件号	明细
211-098	细目过滤中心环组件DN 25 ISO-KF
351-550	MxG50x 点火单元
211-113	中心圈 with baffle DN 25 KF
353-512	Baffle for BPG400
MPG5xx
零件号	明细
211-098	细目过滤中心环组件DN 25 ISO-KF
351-550	MxG50x 点火单元
211-113	中心圈 with baffle DN 25 KF
353-512	Baffle for BPG400

备件

MAG5xx
零件号	明细
351-500	MAG500 spare sensor, 25KF, SS
351-556	Spare ion chamber ti
351-512	MAG500 spare sensor, 40KF, SS
351-536	MAG500 spare sensor, 40CF-R, SS
351-524	MAG500 spare sensor, 40CF-F, SS
351-502	MAG500 spare sensor, 25KF, TI
351-514	MAG500 spare sensor, 40KF, TI
351-538	MAG500 spare sensor, 40CF-R, TI
351-526	MAG500 spare sensor, 40CF-F, TI
351-501	MAG504 spare sensor, 25KF, SS
351-513	MAG504 spare sensor, 40KF, SS
351-537	MAG504 spare sensor, 40CF-R, SS
351-525	MAG504 spare sensor, 40CF-F, SS
351-503	MAG504 Ersatzsensor, 25KF, TI
351-515	MAG504 spare sensor, 40KF, TI
351-539	MAG504 spare sensor, 40CF-R, TI
351-527	MAG504 spare sensor, 40CF-F, TI
351-995	起辉器
351-555	Spare ion chamber ss
MPG5xx
零件号	明细
351-506	MPG500 spare sensor, 25KF, SS
351-518	MPG500 spare sensor, 40KF, SS
351-542	MPG500 spare sensor, 40CF-R, SS
351-530	MPG500 spare sensor, 40CF-F, SS
351-508	MPG500 spare sensor, 25KF, TI
351-520	MPG500 spare sensor, 40KF, TI
351-544	MPG500 spare sensor, 40CF-R, TI
351-532	MPG500 spare sensor, 40CF-F, TI
351-507	MPG504 spare sensor, 25KF, SS
351-519	MPG504 spare sensor, 40KF, SS
351-543	MPG504 spare sensor, 40CF-R, SS
351-531	MPG504 spare sensor, 40CF-F, SS
351-509	MPG504 spare sensor, 25KF, TI
351-521	MPG504 spare sensor, 40KF, TI
351-545	MPG504 spare sensor, 40CF-R, TI
351-533	MPG504 spare sensor, 40CF-F, TI
351-995	起辉器
351-555	Spare ion chamber ss
351-556	Spare ion chamber ti

数据表

手册

三维步骤文件

视频

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产品简介

详细介绍