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thyrcont图拉特真空计VSM78D
The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
The microcontroller intelligence of this vacuum gauge automatically manages the optional interplay of both vacuum sensors.
描述
Wide range sensor Pirani / cold cathode
Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime
Robust sensor design, insensitive against inrush of air
Digital RS485 interface and analog output signal 1.819-8.6 V
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data
应用
Mass spectrometry
Coating plants and vapor deposition
Measuring and controlling in fine and ultrahigh vacuum
Process engineering
Sputtering plants
Vacuum furnaces
技术参数
| WEIGHT | 0.555 kg |
|---|---|
| DIMENSIONS | 6.9 x 4.8 x 15.3 cm |
| MEASURING PRINCIPLE | Pirani / inverted magnetron, both depending on gas type |
| MATERIALS IN CONTACT WITH VACUUM | Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic |
| MEASUREMENT RANGE | 1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs. |
| ACCURACY | 1000 – 10 mbar: < 30 % from reading 10 – 2e-3 mbar: < 10 % from reading 2e-3 mbar – 1e-8 mbar: < 25% from reading |
| REPEATABILITY | 10 – 1e-2 mbar: Approx. ±2% from reading, 1e-2-1e-8 mbar: Approx. ±7% from reading |
| RESPONSE TIME | 200 ms (1s for activating the cold cathode) |
| POWER SUPPLY | 20 – 30 VDC |
| ELECTRICAL CONNECTION | SubD, 15pol., male, lockable |
| POWER CONSUMPTION | Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD |
| OPERATING TEMPERATURE | +5…+60°C |
| STORAGE TEMPERATURE | -40…+65°C |
| MAX. BAKE OUT TEMPERATURE | 160°C at flange (electronic detached) |
| OUTPUT SIGNAL | 0 – 10 VDC, measuring range 1.819 – 8.6 VDC, log., 0.6 V/decade load resistor > 10 kOhm |
| SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16 |
| SWITCH POINT | 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA |
| VACUUM CONNECTION | DN 40 ISO-KF |
| PROTECTION CLASS | IP40 |
vsme.pdf
man_vsm-de-en-171005.pdf
